Equipment Name: ML10 laser interferometer
Product Category: Three-coordinate measuring machine and measuring tool and instrument-measuring instrument-laser interferometer
Product Parameters: Single frequency, plane
Product Brand: Renishaw
Place of Production: UK
Technical Parameters:
1. Linear Measurement Resolution: 0.001μm
2. Linear Measurement Range: 40m (or 80m optional)
3. Linear Measurement Accuracy: ±0.7ppm
4. Max. Measurement Speed: 60m/min
5. Long-term frequency Stabilization Precision: ±0.05ppm